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Introduction to Microelectronic Fabrication

Introduction to Microelectronic Fabrication

Introduction to Microelectronic Fabrication

This lecture note provides an introduction to the theoretical background and application of each major IC fabrication processes: eg. oxidation, doping, depositions, photolithography and etching. The prerequisites are the students need are an understanding of basic transistor and diode operation. Topics covered includes: Clean Room Technology Silicon Wafer Production, Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields, Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice, Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma etching.

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