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Notes for Microelectronics Fabrication

Notes for Microelectronics Fabrication

Notes for Microelectronics Fabrication

This note covers the following topics: Semiconductor and Solid State Physics, Crystal Structure and Growth, Defects in Semiconductors and Internal Gettering, Silicon Dioxide and Thermal Oxidation, Current-Voltage Analysis, Thickness Measurement, Ultra Thin Oxides, Impurity Diffusion, Sheet Resistance and Diffusion Profiles, Electrical Characteristics of pn-Junctions, Atomic Processes of Diffusion, Ion Implantation, Implanted and Diffused Profiles.

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s242 Pages
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