MCEE 732 Microelectronics Manufacturing     (Spring 2019)
 

Lesson	Date	Discussion Topic	Lecture Documents	Reference Documents	Homework
No.				Videos, Presentations, Excel
1.	1/15	Factory Orientation Intro to Mesa Lab Notebook Example	out_732.pdf CMOS_Factory.ppt MESA.pdf	Factory Presentation MESA Presentation MESAHELP Query Presentation PROCESS.pdf PROCESS Presentation Lab Notebook.pdf	HW on Factory Presentation HW on MESA View all documents
2.	1/17	RIT Submicron CMOS Process	Sub-CMOS2014.pdf	Sub-CMOS Presentation
3.	1/22	RIT Submicron CMOS Process	Sub-CMOS2014.pdf	Sub-CMOS Presentation Plasma Etch.wmv	HW on Sub-CMOS
4.	1/24	TQM, SPC and Process Capability Analysis	TQM.pdf	TQM Presentation	HW TQM
5.	1/29	Review of IC Technology	REVIEW.pdf	Review Presentation	HW on Review
6.	1/31	Advanced MOSFET Basics	ADV_MOSFET_Basics.pdf	MOSFET Basics Presentation	HW on Adv CMOS Basics
7.	2/5	Advanced CMOS Technology Parts 1	ADV_CMOS_Part 1.pdf	Adv CMOS Part1 Presentation	HW on Part 1
8.	2/7	Advanced CMOS Technology Part 2	ADV_CMOS_Part 2.pdf	Adv CMOS Part 2 Presentation	HW on Part 2
9.	2/12	ASML Stepper	ALIGN ASML.pdf	ASML Presentation	HW on ASML
10.	2/14	Ion Implant	Implant.pdf	Implant Presentation	HW on Implant
11.	2/19	CVD and RTP Optical Film Thickness Measurements	CVD.pdf RTP.pdf Thickness Measurments.pdf	NanoSpec.pdf Reflect.xls Reflect2layers.xls	View CVD and RTP View Recipes at Labnotes View all Reference Documents
12.	2/21	Wet Etch Plasma Etch CMP	Wet_Etch.pdf Plasma Etch.pdf CMP.pdf	Plasma Etch.wmv	View Recipes at Labnotes
13.	2/26	Defect Reduction and Yield Enhancement	lec_deft.pdf	Reading	HW on Yield and Defects Reading
14.	2/27	Particle Count Studies	par count.pdf bluebooties.pdf		HW none
15.	3/5	Hand Calculations for Adv CMOS	Hand Calc Adv Cmos.pdf	Hand Calc_Presentation	HW on Hand Calculations
16.	3/7	RIT's Advanced CMOS Process Integration	AdvCmosProcessIntegration.pdf		HW on Adv CMOS Process Integration
	3/12	No Classes Spring Break
	3/14	No Classes Spring Break
17.	3/19	RIT's Advanced CMOS Process Simulation	AdvCmosProcessSimulation.pdf CMOS-xsection
18.	3/21	0.25 µm CMOS Process Development	MAquilinoThesis.pdf VideoPresentation.ppt	Video File Available Upon Request	Watch the Video
19.	3/26	Factory Performance	fac_pfrm.pdf	Factory Performance	HW on Fac Performance
20.	3/28	Scheduling	lec_schl.pdf autosched.ppt input.xls	Factory Simulation	HW on Scheduling
21.	4/2	Cycle Time Management	cycle.pdf CYCLE2MOD.XLS		HW on Cycle Time
22.	4/4	Reliability	lec_reli.pdf		HW on Reliability
23.	4/9	Testing Device Problem Analysis	Device-Problem-Analysis.pdf		HW none
24.	4/11	Testing	cmostest.ppt TestResults.ppt test_dig.ppt Test Manual CMOS TestingJohnGalt1.pdf NMOS_TEST_DATA.xls PMOS_TEST_DATA.xls	ICS Test Setups.ics	HW Test NMOS, PMOS and VDP
25.	4/16	Linear Technology LTSPICE Intro to LTSPICE Video RIT SPICE Models	Intro to LTSPICE.pdf Intro to LTSPICE.wmv MODELS.txt	Intro to LTSPICE Intro SPICE_MOSFET_Models SPICE MOSFET Models	HW on Intro to LTSPICE
26.	4/18	Static Random Access Memory SRAM	SRAM.pdf		HW none
27.	4/23	SRAM			HW on SRAM
28.	4/25	Dynamic Random Access Memory DRAM	DRAM.pdf	EEPROM_Flash.pdf	HW none
		Microelectronic Eng Conference
	4/30	Reading Day	EEPROM_Flash.pdf
		Final Exams