VLSI Design by Gayatri Vidhya Parishad, College of Engineering
This note covers the following topics:
The Integrated Circuit, Architectural Design, N-channel Depletion Mode
Transistor (De-MOSFET), IC Production Processes, Oxidation, Masking And
Lithography, Etching, Doping, Metallization, MOS And CMOS Fabrication Process,
BICMOS Circuits.
Author(s): Gayatri
Vidhya Parishad, College of Engineering
59 Pages