Inorganic Functional Materials Lecture Notes
This note covers the following topics: Cleanroom and Vacuum Technology,
Wafer Substrate Materials, Physical Vapor Deposition, UV Lithography, Silicon
Doping, Dry Etching, Optical Lithography - Resolution Enhancement, Surface
Micromachining, Capacitive Sensors - Electrostatic Actuators, Wafer Bonding,
Chemical Vapor Deposition, Wet Etching, Piezoresistive Sensors, Pressure
Sensors, Thermal MEMS and MOEMS.
Author(s): Christian-Albrechts-University
Kiel
NA Pages