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Inorganic Functional Materials Lecture Notes

Inorganic Functional Materials Lecture Notes

Inorganic Functional Materials Lecture Notes

This note covers the following topics: Cleanroom and Vacuum Technology, Wafer Substrate Materials, Physical Vapor Deposition, UV Lithography, Silicon Doping, Dry Etching, Optical Lithography - Resolution Enhancement, Surface Micromachining, Capacitive Sensors - Electrostatic Actuators, Wafer Bonding, Chemical Vapor Deposition, Wet Etching, Piezoresistive Sensors, Pressure Sensors, Thermal MEMS and MOEMS.

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