This lecture
note provides an introduction to the theoretical background and
application of each major IC fabrication processes: eg. oxidation, doping,
depositions, photolithography and etching. The prerequisites are the students
need are an understanding of basic transistor and diode operation. Topics
covered includes: Clean Room Technology Silicon Wafer Production,
Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion
Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields,
Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice,
Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma
etching.
This note covers the following topics: Fundamental circuit
concepts and analysis techniques , First and second order circuits, impulse and
frequency response, Op Amps, Diode and FET: Device and Circuits, Amplification,
Logic, Filter.
This note focuses on CMOS
manufacturing. Topics covered includes: CMOS process technology, work in progress
tracking, CMOS calculations, process technology, long channel and short channel
MOSFET, isolation technologies, back-end processing and packaging.
The target
audience of this note is undergraduate chemical engineering and electronics and
communication engineering students. The focus will be on the various modules
relevant for chip manufacturing. Topics covered includes: Lithography, Depostion
Techniques, Removal Techniques, FEOL, Diffusion, Ion Implantation, Oxidation, ,
process Integration, Testing, Yield, Tools and Techniques.
This lecture
note provides an introduction to the theoretical background and
application of each major IC fabrication processes: eg. oxidation, doping,
depositions, photolithography and etching. The prerequisites are the students
need are an understanding of basic transistor and diode operation. Topics
covered includes: Clean Room Technology Silicon Wafer Production,
Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion
Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields,
Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice,
Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma
etching.
Understanding
semiconductor devices is critical in designing and improving many types of
systems. This note provides an understanding of the most fundamental aspects of
semiconductor materials and provide the mathematical formulation for
understanding how advanced devices work.
This lecture notes teach the
fundamentals of non-linear circuit elements including diodes, and transistors (BJT
and FET) , how they are used in circuits and real world applications.