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Introduction to Microelectronic Fabrication
This lecture note provides an introduction to the theoretical background and application of each major IC fabrication processes: eg. oxidation, doping, depositions, photolithography and etching. The prerequisites are the students need are an understanding of basic transistor and diode operation. Topics covered includes: Clean Room Technology Silicon Wafer Production, Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields, Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice, Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma etching.
Author(s): Prof. Glenn Chapman
NA Pages 
Introduction to Microelectronic Circuits Lecture Notes
This note covers the following topics: Fundamental circuit concepts and analysis techniques , First and second order circuits, impulse and frequency response, Op Amps, Diode and FET: Device and Circuits, Amplification, Logic, Filter.
Author(s): Prof. C. Chang-Hasnain
103 Pages
Microelectronics Manufacturing
This note focuses on CMOS manufacturing. Topics covered includes: CMOS process technology, work in progress tracking, CMOS calculations, process technology, long channel and short channel MOSFET, isolation technologies, back-end processing and packaging.
Author(s): Dr. Lynn Fuller
NA Pages
Notes for Microelectronics Fabrication
This note covers the following topics: Semiconductor and Solid State Physics, Crystal Structure and Growth, Defects in Semiconductors and Internal Gettering, Silicon Dioxide and Thermal Oxidation, Current-Voltage Analysis, Thickness Measurement, Ultra Thin Oxides, Impurity Diffusion, Sheet Resistance and Diffusion Profiles, Electrical Characteristics of pn-Junctions, Atomic Processes of Diffusion, Ion Implantation, Implanted and Diffused Profiles.
Author(s): David R. Evans
242 Pages
Introduction to Microelectronic Fabrication Processes
The target audience of this note is undergraduate chemical engineering and electronics and communication engineering students. The focus will be on the various modules relevant for chip manufacturing. Topics covered includes: Lithography, Depostion Techniques, Removal Techniques, FEOL, Diffusion, Ion Implantation, Oxidation, , process Integration, Testing, Yield, Tools and Techniques.
Author(s): Dr. S. Ramanathan
NA Pages
Introduction to Microelectronic Theory
Understanding semiconductor devices is critical in designing and improving many types of systems. This note provides an understanding of the most fundamental aspects of semiconductor materials and provide the mathematical formulation for understanding how advanced devices work.
Author(s): Alan Doolittle
NA Pages
This lecture notes teach the fundamentals of non-linear circuit elements including diodes, and transistors (BJT and FET) , how they are used in circuits and real world applications.
Author(s): Alan Doolittle
NA Pages