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Introduction to Microelectronic Fabrication
This lecture note provides an introduction to the theoretical background and application of each major IC fabrication processes: eg. oxidation, doping, depositions, photolithography and etching. The prerequisites are the students need are an understanding of basic transistor and diode operation. Topics covered includes: Clean Room Technology Silicon Wafer Production, Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields, Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice, Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma etching.
Author(s): Prof. Glenn Chapman
NA Pages 
Fundamentals of Microelectronics Lecture Note
This note covers the following topics: Basic Physics of Semiconductors, Diode Circuits, Physics of Bipolar Transistors, Bipolar Amplifiers, Physics of MOS Transistors, CMOS Amplifiers, Operational Amplifier as a Blac Box.
Author(s): Seoul National University
NA Pages
Introduction to Microelectronic Fabrication Processes
The target audience of this note is undergraduate chemical engineering and electronics and communication engineering students. The focus will be on the various modules relevant for chip manufacturing. Topics covered includes: Lithography, Depostion Techniques, Removal Techniques, FEOL, Diffusion, Ion Implantation, Oxidation, , process Integration, Testing, Yield, Tools and Techniques.
Author(s): Dr. S. Ramanathan
NA Pages
Introduction to Microelectronic Fabrication
This lecture note provides an introduction to the theoretical background and application of each major IC fabrication processes: eg. oxidation, doping, depositions, photolithography and etching. The prerequisites are the students need are an understanding of basic transistor and diode operation. Topics covered includes: Clean Room Technology Silicon Wafer Production, Thermal Oxidation, Lithography, Advanced Lithography, Etching , Diffusion Processes and Ion Implantation, Thin Film Deposition, Packaging, Yields, Processing Silicon Foundries, CMOS and Bipolar Process Integration in practice, Photolithography: resists, coating and mask aligners, CVD epitaxy and Plasma etching.
Author(s): Prof. Glenn Chapman
NA Pages
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
This book focuses on the latest development of devices and fabrication processes in the field of extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research.
Author(s): Kenichi Takahata
226 Pages
Introduction to Microelectronic Theory
Understanding semiconductor devices is critical in designing and improving many types of systems. This note provides an understanding of the most fundamental aspects of semiconductor materials and provide the mathematical formulation for understanding how advanced devices work.
Author(s): Alan Doolittle
NA Pages
This lecture notes teach the fundamentals of non-linear circuit elements including diodes, and transistors (BJT and FET) , how they are used in circuits and real world applications.
Author(s): Alan Doolittle
NA Pages